A Detailed Explanation of MEMS High-Temperature Pressure Sensors 3

5、 Application

The application of MEMS high-temperature pressure sensors is very extensive, including the following aspects:

1. Automotive industry: used for measuring combustion chamber pressure and airbag inflation pressure in automotive engines.

2. Aerospace: Used for aerodynamic research and engine monitoring of aircraft.diode

3. Chemical industry: used for pressure control, fluid flow measurement, etc. in chemical processes.

4. Petroleum industry: used for monitoring and controlling oil well pressure, oil and gas pipeline pressure, etc.

5. Medical field: used for measuring physiological parameters such as blood pressure and lung function.diode

In summary, MEMS high-temperature pressure sensors are prepared using micro nano technology and have advantages such as high precision, high reliability, and wide operating temperature range. They are widely used in the automotive industry, aerospace, chemical industry, and other fields.diode