Capacitive silicon micromachined gyro with mechanical coupling for sensitive signal reading 6

Figure 6 Control timing sequence

Each pulse can be sent out through the on-chip peripheral PWM interface, which basically does not consume software time. For a specific silicon micro gyroscope, once the initial search and calibration are completed, the pulse timing becomes a fixed constant. When running normally, the software only completes simple compensation and correction work. Further consideration could be given to using SOC devices to integrate functions such as S/H1, S/H2, A2, A/D, PWM, and CPU onto a single chip.  diode

4、 Conclusion

Any silicon micro gyroscope inevitably suffers from mechanical coupling interference. This article analyzes and points out the available sampling time for sensitive signals with the minimum interference impact. This sampling time is close to the peak point of the sensitive signal. By combining the method of turning off the driving signal during sampling proposed in previous articles, the performance of silicon micro gyroscopes can be improved. The author believes that due to the differences in resonant frequencies of various micro gyroscopes, the method of directly detecting the moment when the mass block passes the equilibrium point still needs to be studied. This will be further research in the future. diode